Introduction of ISO 14644-16：2019 Cleanrooms and associated controlled environments—Part 16: Energy efficiency in cleanrooms and separative devices

ISO released the first edition of the ISO 14644-16 in May 2019, giving guidance and recommendations for energy saving in cleanrooms and separative devices, defining several terms and evaluation indicators about energy saving of cleanrooms, and summarizing energy saving opportunities. Presents the content of the standard briefly，and analyses technical measures for cleanroom energy saving.